Charge breakdown avoidance for MIM elements in SOI base technology and method

ABSTRACT

A semiconductor device including at least one capacitor formed in wiring levels on a silicon-on-insulator (SOI) substrate, wherein the at least one capacitor is coupled to an active layer of the SOI substrate. A method of fabricating a semiconductor structure includes forming an SOI substrate, forming a BOX layer over the SOI substrate, and forming at least one capacitor in wiring levels on the BOX layer, wherein the at least one capacitor is coupled to an active layer of the SOI substrate.

CROSS REFERENCE TO RELATED APPLICATION

This application is a divisional of U.S. application Ser. No.12/046,560, filed Mar. 12, 2008, the contents of which are incorporatedby reference herein in their entirety.

FIELD OF THE INVENTION

The invention generally relates to a semiconductor device and methodsfor manufacturing a semiconductor device with improved deviceperformance, and more particularly to a semiconductor device having atleast one capacitor (e.g. MIM cap or VPP cap) formed in wiring levels onan SOI substrate, wherein the capacitor is coupled to an active layer ofthe SOI substrate.

BACKGROUND OF THE INVENTION

A conventional semiconductor device includes an SOI substrate havingembedded therein n+ regions. One or more capacitors are arranged inwiring levels over the n+ regions with one plate of the capacitorarranged in a wiring level, e.g., Mx, and another plate of the capacitorarranged in another or lower wiring level, e.g., Mx−1. The plates of thecapacitor are connected to the n+ regions via, e.g., wires, via stacks,etc.

Interest has been expressed in installing a metal-on-insulator (MIM)capacitor element into silicon-on-insulator (SOI) technology base. Thebasic MIM as practiced in bulk technology requires tying both ends ofthe MIM plates to reverse bias junction in the substrate to eliminatepotential charging effects which could damage the MIM. In SOI thesediffusions are isolated so an alternate protection scheme is required.

Accordingly, there exists a need in the art to overcome the deficienciesand limitations described hereinabove.

SUMMARY

In a first aspect of the invention, there is provided a semiconductorstructure comprising at least one capacitor formed in wiring levels on asilicon-on-insulator (SOI) substrate, wherein the at least one capacitoris coupled to an active layer of the SOI substrate.

In a second aspect of the invention, there is a semiconductor structurecomprising a silicon-on-insulator (SOI) substrate, a buried oxide (BOX)layer formed on the SOI substrate, and at least one capacitor formed inwiring levels on the silicon-on-insulator (SOI) substrate, wherein theat least one capacitor is coupled to an active layer of the SOIsubstrate.

In a third aspect of the invention, there is a method of fabricating asemiconductor structure comprising forming an SOI substrate, forming aBOX layer over the SOI substrate, and forming at least one capacitor inwiring levels on or over the BOX layer, wherein the at least onecapacitor is coupled to an active layer of the SOI substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows one embodiment of a semiconductor device according toaspects of the invention;

FIG. 2 shows another embodiment of a semiconductor device according toaspects of the invention; and

FIGS. 3-6 show embodiments of methods of making semiconductor deviceaccording to aspects of the invention.

DETAILED DESCRIPTION

The invention is directed to a semiconductor device and methods formanufacturing a semiconductor device with improved device performance,and more particularly to a semiconductor device comprising at least onecapacitor (e.g., metal-on-insulator (MIM) cap or vertical-parallel-plate(VPP) cap) formed in wiring levels on a silicon-on-insulator (SOI)substrate. In embodiments, the capacitor is coupled to an active layerof the SOI substrate.

The invention is also directed to a semiconductor device wherein the MIMplates are tied to a back-to-back lateral diode circuit, wherebycapacitor breakdown is clamped to a base-to-emitter voltage (VBE) abovediode breakdown. The diode can be further tuned, as needed, withadditional processing. Preferably, the wire runs are made as symmetricalas possible in order to minimize asymmetric charging effects caused bydifferent via and wire topology between the cap leads.

In an embodiment of the invention, a MIM cap is formed in wiring levelson an SOI substrate and the MIM cap is coupled to a voltage clamp deviceformed on a silicon active layer of the SOI substrate. The voltage clampdevice can comprise a back-to-back lateral diode with an internalterminal coupled to ground, or a body contacted field effect transistor(FET). As a result, the MIM capacitor breakdown voltage is clamped to aVBE (about 0.7 volts) above the voltage clamp device breakdown voltage(about 8 volts for a back-to-back lateral diode, and about 3-4 volts fora body-contacted FET).

FIG. 1 shows one exemplary substrate structure according to theinvention. More particularly, a silicon-on-insulator (SOI) typesubstrate structure is shown. The SOI structure has an SOI substrate 10.A buried oxide (BOX) layer 60 is formed on the substrate 10. Asemiconductor layer 20, which can be a silicon layer, is formed on theburied oxide layer 60, and is isolated from the SOI layer 10 by the BOXlayer 60. The semiconductor layer 20 may be comprised of varioussemiconductor materials, such as, for example, Si, SiGe, SiC, SiGeC,etc. The substrate 10 may be fabricated using techniques well know tothose skilled in the art. For example, the substrate 10 may be formed byconventional bonding and cutting processes, or alternatively, aconventional separation by implantation of oxygen (SIMOX) process. Thesubstrate 10 may have any desired thickness based upon the intended useof the final semiconductor device. In embodiments, the BOX layer 60 hasa thickness of between about 100 nanometers (nm) to about 200 nm, andthe semiconductor layer arranged above the BOX layer 60 can have athickness of between about 10 nm to about 100 nm.

As can be seen in FIG. 1, the semiconductor layer 20 includes an n+region 20 a and a p+ region 20 c with an n-type region 20 b arrangedtherebetween, as well as p+ region 20 c and an n+ region 20 a with ann-type region 20 b arranged therebetween. These regions are lateralstructures. A shallow-trench-isolation structure (STI) 70 is arrangedbetween these regions. Additionally, polysilicon gates 80, which can beformed by a layer of polysilicon over an oxide layer, are arranged onthe semiconductor layer with one gate 80 arranged over the n+ region,n-type region, and p+ region, and with another gate 80 arranged over thep+ region, n-type region, and n+ region. The gates 80 can of course benFETs and/or pFETs. Techniques known in the art may be utilized to formthe gates, STI region 70, as well as the n+, p+, the n-type, and p-typeregions. Such conventional techniques include patterning with aphotoresist, etching, chemical vapor deposition, and planarizing such asby chemical mechanical polishing.

Again, with reference to FIG. 1, one or more capacitors 30 are arrangedin wiring levels over the gates 80 with one plate of the capacitor 30arranged in a wiring level above the gates 80, e.g., an Mx wiring level,and another plate of the capacitor 30 arranged in another or lowerwiring level, e.g., an Mx−1 wiring level. The plates of the capacitor 30are connected to the n+ regions 20 a via connections 40 and 50. Theseconnections 40, 50 can be, e.g., wires, via stacks, etc., and arepreferably made of copper. The capacitor(s) 30 can be connected inseries or parallel and can be arranged in multiple wiring levelsarranged above the polysilicon gates 80. Finally, one or more wires 90form connections between the p+ regions 20 c that are separated by theSTI region 70. The wire(s) 90 can be arranged in a wiring level, e.g.,an M1 wiring level, and can preferably be made of, e.g., tungsten.

The capacitor 30 can be a metal-on-insulator (MIM) capacitor.Alternatively, the capacitor 30 can be a vertical-parallel-plate (VPP)capacitor. The capacitor can also be a metal-on-insulator (MIM)capacitor with MIM plates of the MIM capacitor being tied to aback-to-back lateral diode circuit, whereby capacitor breakdown isclamped to a base-to-emitter voltage (VBE) above diode breakdown. Thecapacitor 20 can also be connected to the active layer 20 withsubstantially symmetrical wire runs or leads, whereby asymmetriccharging effects caused by different via and wire topology areminimized. Still further, the capacitor 30 can be a MIM capacitor formedin wiring levels that is coupled to a voltage clamp device formed on theactive layer of the SOI substrate 10. The voltage clamp device can be aback-to-back lateral diode with an internal terminal coupled to ground.

A breakdown voltage of the MIM capacitor can be clamped to a VBE ofabout 0.7 volts above the voltage clamp device breakdown voltage ofabout 8 volts for the back-to-back lateral diode. The voltage clampdevice can comprise a body contacted field effect transistor (FET).Alternatively, a breakdown voltage of the MIM capacitor can be clampedto a VBE of about 0.7 volts above the voltage clamp device breakdownvoltage of about 3-4 volts for the body-contacted FET.

FIG. 2 shows another exemplary substrate structure according to theinvention. More particularly, a silicon-on-insulator (SOI) typesubstrate structure is shown. The SOI structure has an SOI substrate 10.A buried oxide (BOX) layer 60 is formed on the substrate 10. Asemiconductor layer 20, which can be a silicon layer, is formed on theburied oxide layer 60, and is isolated from the SOI layer 10 by the BOXlayer 60. The semiconductor layer 20 may be comprised of varioussemiconductor materials, such as, for example, Si, SiGe, SiC, SiGeC,etc. The substrate 10 may be fabricated using techniques well know tothose skilled in the art. For example, the substrate 10 may be formed byconventional bonding and cutting processes, or alternatively, aconventional separation by implantation of oxygen (SIMOX) process. Thesubstrate 10 may have any desired thickness based upon the intended useof the final semiconductor device. In embodiments, the BOX layer 60 hasa thickness of between about 100 nanometers (nm) to about 200 nm, andthe semiconductor layer arranged above the BOX layer 60 can have athickness of between about 10 nm to about 100 nm.

As can be seen in FIG. 2, semiconductor layer 20 includes an n+ region20 a and a p+ region 20 c with an p-type region 20 d arrangedtherebetween, as well as p+ region 20 c and an n+ region 20 a with anp-type region 20 d arranged therebetween. These regions are lateralstructures. A shallow-trench-isolation structure (STI) 70 is arrangedbetween these regions. Additionally, polysilicon gates 80, which can beformed by a layer of polysilicon arranged over an oxide layer, arearranged on the semiconductor layer with one gate 80 arranged over then+ region 20 a, p-type region 20 d, and p+ region 20 c, and with anothergate 80 arranged over the p+ region 20 c, p-type region 20 d, and n+region 20 a. The gates 80 can of course be nFETs and/or pFETs.Techniques known in the art may be utilized to form the gates, STIregion 70, as well as the n+, the p+, the n-type, and the p-typeregions. Such conventional techniques include patterning with aphotoresist, etching, chemical vapor deposition, and planarizing such asby chemical mechanical polishing.

Again, with reference to FIG. 2, one or more capacitors 30 are arrangedin wiring levels over the gates 80 with one plate of the capacitor 30arranged in a wiring level above the gates 80, e.g., an Mx wiring level,and another plate of the capacitor 30 arranged in another or lowerwiring level, e.g., an Mx−1 wiring level. The plates of the capacitor 30are connected to the n+ regions 20 a via connections 40 and 50. Theseconnections 40, 50 can be, e.g., wires, via stacks, etc, and arepreferably made of copper. The capacitor(s) 30 can be connected inseries or parallel and can be arranged in multiple wiring levelsarranged above the polysilicon gates 80. Finally, one or more wires 90form connections between the p+ regions 20 c that are separated by theSTI region 70. The wire(s) 90 can be arranged in a wiring level, e.g.,an M1 wiring level, and can preferably be made of, e.g., tungsten.

The capacitor 30 in embodiments can be a metal-on-insulator (MIM)capacitor. Alternatively, the capacitor 30 can be avertical-parallel-plate (VPP) capacitor. The capacitor 30 can also be ametal-on-insulator (MIM) capacitor with MIM plates of the MIM capacitorbeing tied to a back-to-back lateral diode circuit, whereby capacitorbreakdown is clamped to a base-to-emitter voltage (VBE) above diodebreakdown. The capacitor 30 can also be connected to the active layerwith substantially symmetrical wire runs or leads, whereby asymmetriccharging effects caused by different via and wire topology areminimized. Still further, the capacitor 30 can be a MIM capacitor formedin wiring levels that is coupled to a voltage clamp device formed on theactive layer of the SOI substrate 10. The voltage clamp device can be aback-to-back lateral diode with an internal terminal coupled to ground.

A breakdown voltage of the MIM capacitor can be clamped to a VBE ofabout 0.7 volts above the voltage clamp device breakdown voltage ofabout 8 volts for the back-to-back lateral diode. The voltage clampdevice can comprise a body contacted field effect transistor (FET).Alternatively, a breakdown voltage of the MIM capacitor can be clampedto a VBE of about 0.7 volts above the voltage clamp device breakdownvoltage of about 3-4 volts for the body-contacted FET.

With reference to FIG. 3, there is shown one non-limiting method ofmaking a semiconductor device which includes the step of forming an SOIsubstrate in step 100. This is followed by forming a BOX layer over theSOI substrate in step 200. Thereafter, at least one capacitor is formedin wiring levels in step 300.

With reference to FIG. 4, there is shown another non-limiting method ofmaking a semiconductor device which includes the step of forming an SOIsubstrate in step 100. This is followed by forming a BOX layer over theSOI substrate in step 200. Thereafter, at least one capacitor is formedin wiring levels over or on the BOX layer in step 310.

With reference to FIG. 5, there is shown another non-limiting method ofmaking a semiconductor device which includes the step of forming an SOIsubstrate in step 100. This is followed by forming a BOX layer over theSOI substrate in step 200. Thereafter, at least one capacitor is formedin wiring levels over or on the BOX layer in step 310. Finally, the atleast one capacitor is coupled to the active layer of the SOI substratein step 400. In embodiments, the at least one capacitor can be at leastone MIM capacitor formed in wiring levels over or on the BOX layer. TheMIM capacitor can be coupled to the active layer of the SOI substrate.Alternatively, the at least one capacitor can be at least one VPPcapacitor formed in wiring levels over or on the BOX layer in step 330.The VPP capacitor can be coupled to the active layer of the SOIsubstrate.

With reference to FIG. 6, there is shown another non-limiting method ofmaking a semiconductor device which includes the step of forming an SOIsubstrate in step 100. This is followed by forming a BOX layer over theSOI substrate in step 200. Thereafter, “n’ and/or “p” regions are formin a silicon layer over or on the BOX layer in step 210. Finally, atleast one capacitor is formed in wiring levels over or on the BOX layerin step 310. At least one capacitor can then be coupled to the activelayer of the SOI substrate in an additional step that is not shown. Inembodiments, the at least one capacitor can be at least one MIMcapacitor formed in wiring levels over or on the BOX layer. The MIMcapacitor can be coupled to the active layer of the SOI substrate.Alternatively, the at least one capacitor can be at least one VPPcapacitor formed in wiring levels over or on the BOX layer. The VPPcapacitor can be coupled to the active layer of the SOI substrate.

The devices and methods as described above is used in the fabrication ofintegrated circuit chips. The resulting integrated circuit chips can bedistributed by the fabricator in raw wafer form (that is, as a singlewafer that has multiple unpackaged chips), as a bare die, or in apackaged form. In the latter case the chip is mounted in a single chippackage (such as a plastic carrier, with leads that are affixed to amotherboard or other higher level carrier) or in a multichip package(such as a ceramic carrier that has either or both surfaceinterconnections or buried interconnections). In any case the chip isthen integrated with other chips, discrete circuit elements, and/orother signal processing devices as part of either (a) an intermediateproduct, such as a motherboard, or (b) an end product. The end productcan be any product that includes integrated circuit chips, ranging fromtoys and other low-end applications to advanced computer products havinga display, a keyboard or other input device, and a central processor.

While the invention has been described in terms of embodiments, thoseskilled in the art will recognize that the invention can be practicedwith modifications and in the spirit and scope of the appended claims.

What is claimed:
 1. A semiconductor structure, comprising: at least onecapacitor formed in wiring levels on a silicon-on-insulator (SOI)substrate, which is coupled to an active layer of the SOI substrate,wherein the at least one capacitor is a metal-on-insulator (MIM)capacitor and wherein MIM plates of the MIM capacitor are tied to aback-to-back lateral diode circuit, whereby capacitor breakdown isclamped to a base-to-emitter voltage (VBE) above diode breakdown.
 2. Thestructure of claim 1, wherein the at least one capacitor is connected tothe active layer with substantially symmetrical wire runs or leads,whereby asymmetric charging effects caused by different via and wiretopology are minimized.
 3. The structure of claim 1, wherein the MIMcapacitor is formed in wiring levels and the active layer of the SOIsubstrate comprises a silicon active layer.
 4. The structure of claim 1,wherein the MIM capacitor formed in wiring levels and the MIM capacitoris coupled to a voltage clamp device is formed on the active layer ofthe SOI substrate.
 5. The structure of claim 4, wherein the voltageclamp device comprises the back-to-back lateral diode with an internalterminal coupled to ground.
 6. The structure of claim 5, wherein abreakdown voltage of the MIM capacitor is clamped to a VBE of about 0.7volts above the voltage clamp device breakdown voltage of about 8 voltsfor the back-to-back lateral diode.
 7. The structure of claim 4, whereina breakdown voltage of the MIM capacitor is clamped to a VBE of about0.7 volts above the voltage clamp device breakdown voltage of about 3-4volts for the body-contacted FET.
 8. The structure of claim 1, whereinfirst and second capacitor plates of the at least one capacitor arecoupled to the active layer of the SOI substrate.
 9. The structure ofclaim 1, further comprising: a first lateral diode in the active layerof the SOI substrate, wherein a first plate of the at least onecapacitor is connected by first wiring to the first lateral diode; and asecond lateral diode in the active layer of the SOI substrate, wherein asecond plate of the at least one capacitor is connected by second wiringto the second lateral diode.
 10. The structure of claim 9, furthercomprising: an isolation region between the first lateral diode and thesecond lateral diode; and third wiring connecting the first lateraldiode to the second lateral diode.
 11. The structure of claim 1, furthercomprising: a first lateral structure in the active layer of the SOIsubstrate and comprising a first n+ region, a first n-type regioncontacting the first n+ region, and a first p+ region contacting thefirst n-type region, wherein a first plate of the at least one capacitoris connected by first wiring to the first n+ region; and a secondlateral structure in the active layer of the SOI substrate andcomprising a second n+ region, a second n-type region contacting thesecond n+ region, and a second p+ region contacting the second n-typeregion, wherein a second plate of the at least one capacitor isconnected by second wiring to the second n+ region.
 12. The structure ofclaim 1, further comprising: a first lateral structure in the activelayer of the SOI substrate and comprising a first n+ region, a firstp-type region contacting the first n+ region, and a first p+ regioncontacting the first p-type region, wherein a first plate of the atleast one capacitor is connected by first wiring to the first n+ region;and a second lateral structure in the active layer of the SOI substrateand comprising a second n+ region, a second p-type region contacting thesecond n+ region, and a second p+ region contacting the second p-typeregion, wherein a second plate of the at least one capacitor isconnected by second wiring to the second n+ region.
 13. A semiconductorstructure, comprising: a silicon-on-insulator (SOI) substrate; a buriedoxide (BOX) layer formed on the SOI substrate; and at least onecapacitor formed in wiring levels on the silicon-on-insulator (SOI)substrate, wherein the at least one capacitor is coupled to an activelayer of the SOI substrate, wherein the at least one capacitor is ametal-on-insulator (MIM) capacitor and wherein MIM plates of the MIMcapacitor are tied to a back-to-back lateral diode circuit, wherebycapacitor breakdown is clamped to a base-to-emitter voltage (VBE) abovediode breakdown.
 14. The structure of claim 13, wherein the at least onecapacitor is connected to the active layer with substantiallysymmetrical wire runs or leads, whereby asymmetric charging effectscaused by different via and wire topology are minimized.
 15. Thestructure of claim 13, wherein the MIM capacitor is formed in wiringlevels and the active layer of the SOI substrate comprises a siliconactive layer.
 16. The structure of claim 13, wherein the MIM capacitoris formed in wiring levels and the MIM capacitor is coupled to a voltageclamp device formed on the active layer of the SOI substrate.
 17. Thestructure of claim 16, wherein: the voltage clamp device comprises theback-to-back lateral diode with an internal terminal coupled to ground,and a breakdown voltage of the MIM capacitor is clamped to a VBE ofabout 0.7 volts above the voltage clamp device breakdown voltage ofabout 8 volts for the back-to-back lateral diode.
 18. The structure ofclaim 13, wherein first and second capacitor plates of the at least onecapacitor are coupled to the active layer of the SOI substrate.